??? ???????

???? 

CDA-450?500?600?700?800?900?1000?1100?1200?1400?1500?1600?1800?2000?2200

?????

?450mm??500mm??600mm??700mm??800mm??900mm?1000mm??1100mm??1200mm??1400mm??1500mm??1600mm ??1800mm??2000mm??2200mm

?????

500mm————2800mm

????

???????????

????

???????????105---10-5Pa

????

????????

????

????MFC????????????????

????

????

PID?????????

????

6?—16?????????????

????

1×10-3Pa

????

??????????

????

20KW———160KW

CDA-D????????????????????

????

CDA-D700

CDA-D900

CDA-D1000

CDA-D1250

CDA-D1500

?????

?700×H900mm

?900×H1100mm

?1000×H1200mm

?1250×H1350mm

?1500×H1350mm

????

???????????????????????????????????????????

?????

?????????????????????

?????

?????????

????

6.0×10-4Pa

????
(???

?????8.0×10-3Pa≤15??

??????

???????+???+???+?????????????????????

????

????+??????

????

????????????????????????????????????????????????????

?????

???????????????????

????????????

??????????????????

???

4??6?

6??8?

8??10?

10??12?

10??12?

????

10KW/1?

20KW/1?

20KW/1?

30KW/1?

40KW/1?

????
????

?????????????????

??????

???450??????PID???

????

3??4??????????????????????

????

?????????????????????????????????

????

??/??????????????PLC??????

?????

40KW

45KW

50KW

60KW

75KW

?????

??????????????????????????????????????????

??????

W2m×L3m

W2.5m×L3.5m

W3m×L4m

W4m×L5m

W4.5m×L6m

??????

??≥0.05.MPa???≤25????0.5-0.8MPa

??

????????????????????????????